Axus Technology - CMP Equipment, Post-CMP Cleaning and Wafer Grinding Equipment
Axus Technology focuses on providing leading edge equipment and process solutions for surface processing applications, including Chemical Mechanical Planarization (CMP), post-CMP cleaning equipment and wafer grinding processes. Axus Technology offers refurbished equipment, sales of spare parts and assemblies, installation and service support, process development services and equipment engineering services.
Axus Technology focuses on providing leading edge equipment and process solutions for surface processing applications, including Chemical Mechanical Planarization (CMP), post-CMP cleaning equipment and wafer grinding processes. Axus Technology offers refurbished equipment, sales of spare parts and assemblies, installation and service support, process development services and equipment engineering services.
SEMICONDUCTOR AND MEMS PROCESS EQUIPMENT FOR CMP AND BACK GRINDING PROCESSES
Axus Technology delivers semiconductor and MEMS process equipment for use with CMP processes, wafer polishing, post-CMP cleaning and wafer grinding. The equipment is either new or refurbished and operates to original OEM specifications. Each tool is provided with a source inspection at our Chandler, Arizona facility, and is packaged with installation and warranty support.
Axus maintains an inventory of processing tools available, which are refurbished and configured to customer specifications.
CMP Tools:
IPEC 472 and IPEC 372M
IPEC 776, Orbital Polisher
Applied Materials Mirra
Strasbaugh 6DSSP
Strasbaugh 6EC
Post-CMP Cleaning Tools:
OnTrak DSS 200 - series 0, 1, and 2
Wafer Grinding Tools:
Strasbaugh 7AF
Strasbaugh 7AA
Disco DFG841
Additionally, all tools can be configured to accommodate various materials, as well as various substrate shapes and sizes.
CMP TOOLS, CLEANING EQUIPMENT AND WAFER GRINDING TOOLS
Axus Technology maintains an extensive catalogue of spare parts and assemblies for the support of CMP tools, post-CMP cleaning equipment and wafer grinding tools. Many of these parts have been provided by the original equipment manufacturer.
The broad array of available parts includes various consumable parts. Parts and assemblies are new and configured specifically for use with these tools.
The technical support team at Axus is composed of engineers and technicians with extensive OEM experience. Axus offers a variety of support programs, including on-call support, service contracts and periodic maintenance programs. The Axus Technology team can also refurbish and upgrade customer tools in our Chandler, Arizona facility.
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